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Micro material processing machine
Example: LMBS UV-150
Characteristics:
- UV-Laser 335 nm
- Working area 150 mm x 150 mm
- Positioning accuracy 1,25 µm
- Dimension of treatment down to less than 5 µm
Application:
- small stencils
- Pinholes und pinhole-arrays
- extremely fine masks
- 3D machining of silicon, ceramics,
metals
- finest treatment of glass
- marking, drilling, cutting
- Microstructures
- Examples of applications
LMBS devices program - 550KB
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